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US Patent 11327228 Photonic device and fabrication method thereof
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Patent
Date Filed
July 9, 2020
Date of Patent
May 10, 2022
Patent Application Number
16925273
Patent Citations
US Patent 10267988 Photonic package and method forming same
US Patent 10509169 Semiconductor structure and manufacturing method of the same
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11327228
Patent Primary Examiner
Ellen E. Kim
CPC Code
G02B 6/136
G02B 6/12004
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