US Patent 11328925 Substrate drying method and substrate processing apparatus

An upper surface of a substrate is supplied with a pre-drying processing liquid which is a solution of a sublimable substance and a solvent. Thereafter, the solvent is evaporated from the pre-drying processing liquid on the substrate and a solid of the sublimable substance is precipitated in the pre-drying processing liquid on the substrate. Thereafter, at least a portion of the solid of the sublimable substance is dissolved in the pre-drying processing liquid on the substrate. Thereafter, the solvent is evaporated from the pre-drying processing liquid in which the solid of the sublimable substance has been dissolved and the solid of the sublimable substance is precipitated onto the substrate. Thereafter, the solid of the sublimable substance is sublimated and removed from the upper surface of the substrate.