Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Makoto Igarashi0
Naoto Tsuji0
Miho Shimotori0
Ippei Yanagisawa0
Date of Patent
May 24, 2022
Patent Application Number
17039874
Date Filed
September 30, 2020
Patent Citations Received
Patent Primary Examiner
Examples of a substrate processing device include an annular distribution ring, a plurality of connection plates continued to the distribution ring and having non-uniform impedances, a shower plate electrically connected to the plurality of connection plates, and a stage provided below the shower plate so as to face the shower plate.
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