US Patent 11360387 Silicon-containing underlayers
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Patent Inventor Names
Charlotte A. Cutler0
Iou-Sheng Ke0
James F. Cameron0
Li Cui0
Paul J. LaBeaume0
Shintaro Yamada0
Suzanne M. Coley0
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US Patent 11360387 Silicon-containing underlayers
Article
Methods of manufacturing electronic devices employing wet-strippable underlayer compositions comprising one or more condensed polymers having an organic polymer chain having pendently-bound moieties having an acidic proton and a pKa in water from −5 to 13 and having pendently-bound siloxane moieties are provided.
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Patent jurisdiction
Patent number
11360387
Date of patent
June 14, 2022
Patent application number
16022874
Date Filed
June 29, 2018
Patent primary examiner
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