Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chung Hwan Shin0
Do Sun Lee0
Joon Gon Lee0
Nam Gyu Cho0
Rak Hwan Kim0
Won Keun Chung0
Date of Patent
June 21, 2022
0Patent Application Number
169029230
Date Filed
June 16, 2020
0Patent Citations
Patent Primary Examiner
A semiconductor device includes a first interlayer insulating film; a conductive connection structure provided in the first interlayer insulating film; a second interlayer insulating film provided on the first interlayer insulating film; a wiring structure provided in the second interlayer insulating film and connected to the conductive connection structure; and an insertion liner interposed between an upper surface of the conductive connection structure and the wiring structure, the insertion liner including carbon.
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