Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Akihisa Shimomura0
Junichi Koezuka0
Kenichi Okazaki0
Shunpei Yamazaki0
Yasumasa Yamane0
Yuhei Sato0
Date of Patent
July 5, 2022
0Patent Application Number
165717690
Date Filed
September 16, 2019
0Patent Citations
Patent Primary Examiner
To provide a novel oxide semiconductor film. The oxide semiconductor film includes In, M, and Zn. The M is Al, Ga, Y, or Sn. In the case where the proportion of In in the oxide semiconductor film is 4, the proportion of M is greater than or equal to 1.5 and less than or equal to 2.5 and the proportion of Zn is greater than or equal to 2 and less than or equal to 4.
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