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US Patent 11387078 Impedance matching device and impedance matching method

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
March 5, 2020
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Date of Patent
July 12, 2022
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Patent Application Number
16809950
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Patent Citations
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US Patent 10026594 RF impedance matching network
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US Patent 10217608 Switching circuit for RF currents
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US Patent 10340879 Switching circuit
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US Patent 10431424 Parasitic capacitance compensation circuit
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US Patent 10431428 System for providing variable capacitance
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US Patent 10455729 Enclosure cooling system
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US Patent 10454453 RF impedance matching network
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US Patent 10460912 RF impedance matching circuit and systems and methods incorporating same
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US Patent 10699881 Impedance matching system, impedance matching method, and semiconductor processing apparatus thereof
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US Patent 10483090 Restricted capacitor switching
Patent Citations Received
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US Patent 11978612 Plasma processing apparatus
0
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US Patent 11791134 Impedance adjustment device
Patent Inventor Names
Tatsuya Morii
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11387078
0
Patent Primary Examiner
‌
Dinh T Le
0
CPC Code
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H01J 37/32183
0
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H01J 37/241
0

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