Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 12, 2022
Patent Application Number
16678371
Date Filed
November 8, 2019
Patent Citations
...
Patent Primary Examiner
An element substrate serving as a substrate for an electro-optical device includes a base material, a TFT disposed on the base material, the TFT including a semiconductor layer, and a first insulating film including a silicon oxide film disposed between the base material and the semiconductor layer, wherein a content of hydrogen in the silicon oxide film is 1.0×10
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