Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alfons Dehe0
Christoph Glacer0
David Tumpold0
Date of Patent
July 12, 2022
0Patent Application Number
162747200
Date Filed
February 13, 2019
0Patent Citations
Patent Primary Examiner
CPC Code
According to an embodiment, a microelectromechanical systems MEMS device includes a first membrane attached to a support structure that a first plurality of acoustic vents; a second membrane attached to the support structure that includes a second plurality of acoustic vents, where the first plurality of acoustic vents and the second plurality of acoustic vents do not overlap; and a closing mechanism coupled to the first membrane and the second membrane.
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