US Patent 11387747 System and method for a MEMS device
Patent 11387747 was granted and assigned to Infineon Technologies on July, 2022 by the United States Patent and Trademark Office.
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Patent Inventor Names
Alfons Dehe0
Christoph Glacer0
David Tumpold0
Edits on 26 Mar, 2023
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Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
113877470
Date of Patent
July 12, 2022
0Patent Application Number
162747200
Date Filed
February 13, 2019
0Patent Citations
Patent Primary Examiner
CPC Code
Edits on 13 Jul, 2022
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Article (+458 characters)
US Patent 11387747 System and method for a MEMS device
Article
According to an embodiment, a microelectromechanical systems MEMS device includes a first membrane attached to a support structure that a first plurality of acoustic vents; a second membrane attached to the support structure that includes a second plurality of acoustic vents, where the first plurality of acoustic vents and the second plurality of acoustic vents do not overlap; and a closing mechanism coupled to the first membrane and the second membrane.
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
11387747
Date of patent
July 12, 2022
Patent application number
16274720
Date Filed
February 13, 2019
Patent citations
Patent primary examiner
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