Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 9, 2022
Patent Application Number
16530438
Date Filed
August 2, 2019
Patent Citations Received
Patent Primary Examiner
A resist composition comprising a base polymer and a quencher in the form of an amine compound having an iodized aromatic ring bonded to the nitrogen atom via a divalent hydrocarbon group offers a high sensitivity and minimal LWR or improved CDU, independent of whether it is of positive or negative tone.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
