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US Patent 11709426 Resist composition and pattern forming process

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Date of Patent

July 25, 2023

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Patent Application Number

171322170

Date Filed

December 23, 2020

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Patent Citations

US Patent 11409194 Resist composition and patterning process

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US Patent 9017922 Chemically amplified resist composition and patterning process

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US Patent 10613437 Resist composition and patterning process

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US Patent 7537880 Polymer, resist composition, and patterning process

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US Patent 8709651 Binder for secondary battery providing excellent adhesion strength and cycle property

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Patent Primary Examiner

Amanda C. Walke

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