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US Patent 11414751 Self-aligned structures from sub-oxides
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Patent
Current Assignee
Applied Materials
Date Filed
August 28, 2018
Date of Patent
August 16, 2022
Patent Applicant
Applied Materials
Patent Application Number
16643967
Patent Citations
US Patent 10083834 Methods of forming self-aligned vias
US Patent 11131015 High pressure oxidation of metal films
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11414751
Patent Primary Examiner
Jose I Hernandez-Kenney
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