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US Patent 11424118 Electronic devices comprising silicon carbide materials
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Patent
Current Assignee
Micron Technology
Date Filed
January 23, 2020
Date of Patent
August 23, 2022
Patent Applicant
Micron Technology
Patent Application Number
16751049
Patent Citations
US Patent 10249819 Methods of forming semiconductor structures including multi-portion liners
US Patent 10147875 Semiconductor devices and electronic systems having memory structures
US Patent 10158000 Low-K dielectric sidewall spacer treatment
US Patent 10211310 Remote plasma based deposition of SiOC class of films
US Patent 10325773 Conformal deposition of silicon carbide films
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11424118
Patent Primary Examiner
Jeffrey D Washville
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