Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tejas Ulavi0
Sanjeev Baluja0
Dhritiman Subha Kashyap0
Date of Patent
August 30, 2022
0Patent Application Number
170669710
Date Filed
October 9, 2020
0Patent Citations
Patent Citations Received
Patent Primary Examiner
Substrate supports comprising a top plate positioned on a shaft are described. The top plate including a primary heating element a first depth from the surface of the top plate, a inner zone heating element a second depth from the surface of the top plate and an outer zone heating element a third depth from the surface of the top plate. Substrate support assemblies comprising a plurality of substrate supports and methods of processing a substrate are also disclosed.
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