US Patent 11430686 Pedestal heater for spatial multi-wafer processing tool
Patent 11430686 was granted and assigned to Applied Materials on August, 2022 by the United States Patent and Trademark Office.
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Patent Inventor Names
Dhritiman Subha Kashyap0
Sanjeev Baluja0
Tejas Ulavi0
Edits on 21 Jun, 2023
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
114306860
Date of Patent
August 30, 2022
0Patent Application Number
170669710
Date Filed
October 9, 2020
0Patent Citations
Patent Primary Examiner
Edits on 27 Sep, 2022
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Patent Citations
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Article (+470 characters)
US Patent 11430686 Pedestal heater for spatial multi-wafer processing tool
Article
Substrate supports comprising a top plate positioned on a shaft are described. The top plate including a primary heating element a first depth from the surface of the top plate, a inner zone heating element a second depth from the surface of the top plate and an outer zone heating element a third depth from the surface of the top plate. Substrate support assemblies comprising a plurality of substrate supports and methods of processing a substrate are also disclosed.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
11430686
Date of Patent
August 30, 2022
Patent Application Number
17066971
Date Filed
October 9, 2020
Patent Citations
Patent Primary Examiner
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