Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Emiko Ono0
Masahiro Fukushima0
Masayoshi Sagehashi0
Yuki Kera0
Date of Patent
September 6, 2022
0Patent Application Number
166697800
Date Filed
October 31, 2019
0Patent Citations
Patent Primary Examiner
CPC Code
A novel salt having an amide bond in its anion structure is provided. A chemically amplified resist composition comprising the salt has advantages including minimal defects and improved values of sensitivity, LWR, MEF and CDU, when processed by lithography using high-energy radiation such as KrF excimer laser, ArF excimer laser, EB or EUV.
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