Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Christopher S. Ngai0
Wenhui Wang0
Huixiong Dai0
Date of Patent
September 6, 2022
Patent Application Number
16550784
Date Filed
August 26, 2019
Patent Citations
Patent Citations Received
Patent Primary Examiner
CPC Code
Methods of forming and processing semiconductor devices which utilize a three-color hardmask process are described. Certain embodiments relate to the formation of self-aligned contacts for metal gate applications. More particularly, certain embodiments relate to the formation of self-aligned gate contacts through the selective deposition of a fill material.
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