Patent attributes
A pump includes a vibrating plate having a piezoelectric body on a first main surface, a cover including a top panel and a side wall, the top panel opposing a second main surface of the vibrating plate opposite to the first main surface, the top panel having a first cavity, and the side wall being connected to an outer peripheral portion of the top panel to surround a space between the top panel and the vibrating plate, a support portion connected to the side wall and supporting an outer periphery of the vibrating plate, and a second cavity formed between the side wall and the vibrating plate in a cross-sectional view in a direction orthogonal to a direction in which the second main surface of the vibrating plate and a main surface of the top panel oppose each other.
