Patent attributes
A piezoelectric pump includes a first top plate, a second top plate, a diaphragm, a first side wall, and a second side wall. The diaphragm has a vibrating part to which a piezoelectric element is attached, a frame part, and a connecting part. The connecting part has formed therein a third opening which lets a first pump chamber and a second pump chamber communicate. The frame part has formed therein a fourth opening which communicates with the third opening and also communicates with outside. The piezoelectric pump further includes: in the first pump chamber, an annular first valve provided as spaced from a first opening in a planar view so as to surround the first opening; and in the second pump chamber, an annular second valve provided as spaced from a second opening in the planar view so as to surround the second opening.
