Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
September 13, 2022
Patent Application Number
16489392
Date Filed
February 19, 2018
Patent Citations
Patent Primary Examiner
The present invention refers to a substrate holder loading device to be used in a clean room and a clean room treatment device containing such substrate holder loading device. Furthermore, the present invention refers to a method of loading a substrate holder with a first substrate, more preferably with a first and a second substrate.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
