US Patent 11443969 Automated substrate holder loading device
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Edits on 28 Jul, 2023
Golden AI
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Patent Applicant
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Patent Number
114439690
Date of Patent
September 13, 2022
0Patent Application Number
164893920
Date Filed
February 19, 2018
0Patent Citations
Patent Primary Examiner
Edits on 23 Apr, 2023
Golden AI
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Golden AI
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Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
114439690
Date of Patent
September 13, 2022
0Patent Application Number
164893920
Date Filed
February 19, 2018
0Patent Citations
Patent Primary Examiner
Edits on 26 Sep, 2022
Golden AI
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Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
114439690
Date of Patent
September 13, 2022
0Patent Application Number
164893920
Date Filed
February 19, 2018
0Patent Citations
Patent Primary Examiner
Golden AI
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US Patent 11443969 Automated substrate holder loading device
Article
The present invention refers to a substrate holder loading device to be used in a clean room and a clean room treatment device containing such substrate holder loading device. Furthermore, the present invention refers to a method of loading a substrate holder with a first substrate, more preferably with a first and a second substrate.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
114439690
Date of Patent
September 13, 2022
0Patent Application Number
164893920
Date Filed
February 19, 2018
0Patent Citations
Patent Primary Examiner
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