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US Patent 11469326 Semiconductor devices and methods of fabrication thereof
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Patent
Date Filed
September 18, 2020
Date of Patent
October 11, 2022
Patent Application Number
17025903
Patent Citations
US Patent 10121870 Semiconductor device structure with strain-relaxed buffer
US Patent 10008583 Gate-all-around nanosheet field-effect transistors and methods of manufacturing the same
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11469326
Patent Primary Examiner
Errol V Fernandes
CPC Code
H01L 21/823821
H01L 21/823807
H01L 21/823412
H01L 21/823418
H01L 21/823425
H01L 21/823814
H01L 29/66636
H01L 29/41791
H01L 29/42392
H01L 29/0673
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