Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 11, 2022
Patent Application Number
17135768
Date Filed
December 28, 2020
Patent Citations Received
Patent Primary Examiner
A metal reuse system for an extreme ultra violet (EUV) radiation source apparatus includes a first metal collector for collecting metal from vanes of the EUV radiation source apparatus, a first metal storage coupled to the first metal collector via a first conduit, a metal droplet generator coupled to the first metal storage via a second conduit, and a first metal filtration device disposed on either one of the first conduit and the second conduit.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.