Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Han-Lung Chang0
Wei-Shin Cheng0
Hsiao-Lun Chang0
Li-Jui Chen0
Po-Chung Cheng0
Date of Patent
July 2, 2024
0Patent Application Number
178752880
Date Filed
July 27, 2022
0Patent Citations
...
Patent Primary Examiner
CPC Code
Patent abstract
A metal reuse system for an extreme ultra violet (EUV) radiation source apparatus includes a first metal collector for collecting metal from vanes of the EUV radiation source apparatus, a first metal storage coupled to the first metal collector via a first conduit, a metal droplet generator coupled to the first metal storage via a second conduit, and a first metal filtration device disposed on either one of the first conduit and the second conduit.
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