Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Zhenwen Ding0
Wendell Glenn Boyd, Jr.0
Vijay D. Parkhe0
Teng-Fang Kuo0
Date of Patent
October 18, 2022
0Patent Application Number
168479540
Date Filed
April 14, 2020
0Patent Citations
Patent Primary Examiner
An electrostatic chuck comprises a ceramic body comprising an embedded electrode and a first ceramic coating on a surface of the ceramic body, wherein the first ceramic coating fills pores in the ceramic body. The electrostatic chuck further comprises a second ceramic coating on the first ceramic coating and a plurality of elliptical mesas on the second ceramic coating, the plurality of elliptical mesas having rounded edges.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
