US Patent 11476146 Substrate support assembly with deposited surface features
Patent 11476146 was granted and assigned to Applied Materials on October, 2022 by the United States Patent and Trademark Office.
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Edits on 16 Oct, 2023
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Patent Inventor Names
Teng-Fang Kuo0
Vijay D. Parkhe0
Wendell Glenn Boyd, Jr.0
Zhenwen Ding0
Edits on 28 Oct, 2022
Golden AI
Edits made to:
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Article (+428 characters)
US Patent 11476146 Substrate support assembly with deposited surface features
Article
An electrostatic chuck comprises a ceramic body comprising an embedded electrode and a first ceramic coating on a surface of the ceramic body, wherein the first ceramic coating fills pores in the ceramic body. The electrostatic chuck further comprises a second ceramic coating on the first ceramic coating and a plurality of elliptical mesas on the second ceramic coating, the plurality of elliptical mesas having rounded edges.
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Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
114761460
Date of Patent
October 18, 2022
0Patent Application Number
168479540
Date Filed
April 14, 2020
0Patent Citations
Patent Primary Examiner
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