Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 15, 2022
Patent Application Number
17100533
Date Filed
November 20, 2020
Patent Citations
Patent Primary Examiner
The present disclosure relates to a semiconductor device including first and second terminals formed on a fin region and a seal layer formed between the first and second terminals. The seal layer includes a silicon carbide material doped with oxygen. The semiconductor device also includes an air gap surrounded by the seal layer, the fin region, and the first and second terminals.
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