Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
December 6, 2022
Patent Application Number
16932725
Date Filed
July 18, 2020
Patent Citations
Patent Primary Examiner
Contact designs for semiconductor FET devices are provided. In one aspect, a contact structure includes: a metal line(s); a first ILD surrounding the metal line(s), wherein a top surface of the first ILD is recessed below a top surface of the metal line(s); a liner disposed on the first ILD and on portions of the metal line(s); a top contact(s) disposed over, and in direct contact with, the metal line(s), wherein an upper portion of the top contact(s) has a width W
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