US Patent 11521894 Partial wrap around top contact
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Edits on 29 Mar, 2023
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Edits on 28 Mar, 2023
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Patent Jurisdiction
Patent Number
115218940
Date of Patent
December 6, 2022
0Patent Application Number
169327250
Date Filed
July 18, 2020
0Patent Citations
Patent Primary Examiner
Edits on 27 Mar, 2023
Golden AI
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Patent Citations
Edits on 7 Dec, 2022
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US Patent 11521894 Partial wrap around top contact
Article
Contact designs for semiconductor FET devices are provided. In one aspect, a contact structure includes: a metal line(s); a first ILD surrounding the metal line(s), wherein a top surface of the first ILD is recessed below a top surface of the metal line(s); a liner disposed on the first ILD and on portions of the metal line(s); a top contact(s) disposed over, and in direct contact with, the metal line(s), wherein an upper portion of the top contact(s) has a width W
Infobox
Is a
Patent Jurisdiction
Patent Number
115218940
Date of Patent
December 6, 2022
0Patent Application Number
169327250
Date Filed
July 18, 2020
0Patent Citations
Patent Primary Examiner
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