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US Patent 11527696 Low footprint resonator in flip chip geometry
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Is a
Patent
Current Assignee
Google
Date Filed
October 5, 2017
Date of Patent
December 13, 2022
Patent Applicant
Google
Patent Application Number
16753431
Patent Citations
US Patent 10134972 Qubit and coupler circuit structures and coupling techniques
US Patent 10121754 Interconnect structures and methods for fabricating interconnect structures
US Patent 10586909 Cryogenic electronic packages and assemblies
US Patent 10658424 Superconducting integrated circuit
US Patent 10199553 Shielded through via structures and methods for fabricating shielded through via structures
US Patent 10242968 Interconnect structure and semiconductor structures for assembly of cryogenic electronic packages
US Patent 10381541 Cryogenic electronic packages and methods for fabricating cryogenic electronic packages
US Patent 10396269 Interconnect structures for assembly of semiconductor structures including superconducting integrated circuits
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11527696
Patent Primary Examiner
Scott B. Geyer
CPC Code
H01P 5/022
H01P 5/028
H01P 3/003
H01P 3/006
H01P 7/086
H01P 3/026
H01L 27/18
H01L 21/76891
H01L 23/49888
H01L 23/53285
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