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US Patent 11532510 Contacts and interconnect structures in field-effect transistors
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Patent
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Date Filed
February 15, 2021
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Date of Patent
December 20, 2022
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Patent Application Number
17176052
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Patent Citations
US Patent 10553481 Vias for cobalt-based interconnects and methods of fabrication thereof
Patent Inventor Names
Ziwei Fang
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Chung-Liang Cheng
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11532510
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Patent Primary Examiner
Telly D Green
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