Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Junichi Koezuka0
Yuhei Sato0
Yasumasa Yamane0
Shunpei Yamazaki0
Kenichi Okazaki0
Akihisa Shimomura0
Date of Patent
December 20, 2022
0Patent Application Number
171207740
Date Filed
December 14, 2020
0Patent Citations
Patent Primary Examiner
To provide a novel oxide semiconductor film. The oxide semiconductor film includes In, M, and Zn. The M is Al, Ga, Y, or Sn. In the case where the proportion of In in the oxide semiconductor film is 4, the proportion of M is greater than or equal to 1.5 and less than or equal 2.5 and the proportion of Zn is greater than or equal to 2 and less than or equal to 4.
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