Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chen Zhang0
Tenko Yamashita0
Joshua M. Rubin0
Brent Anderson0
Date of Patent
January 24, 2023
0Patent Application Number
172483300
Date Filed
January 20, 2021
0Patent Citations
Patent Primary Examiner
A method comprising forming at least one fin on a substrate, wherein the at least one fin has a first section and a second section. Forming a separating layer on the substrate to isolate the second section of the fin from the first section of the fin. Forming as first set of electrical components on the first section of the at least one fin. Flipping the substrate over and removing the substrate to expose a surface of the second section of the at least one fin. Removing a portion of the second section of the at least one fin, whereby removing a portion of the second section a trench is created between sections of the separating layer and an exposed portion of the at least one fin and forming a hard mask in the trench.
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