Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 31, 2023
Patent Application Number
16720154
Date Filed
December 19, 2019
Patent Citations
...
Patent Citations Received
Patent Primary Examiner
A plasma processing apparatus includes a balun having a first input terminal, a second input terminal, a first output terminal, and a second output terminal, a vacuum container, a first electrode electrically connected to the first output terminal, a second electrode electrically connected to the second output terminal, and a connection unit configured to electrically connect the vacuum container and ground, the connection unit including an inductor.
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