Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tadashi Inoue
Nobuaki Tsuchiya
Kazunari Sekiya
Tatsunori Sato
Hiroshi Sasamoto
Masaharu Tanabe
Date of Patent
September 12, 2023
Patent Application Number
17452640
Date Filed
October 28, 2021
Patent Citations
...
Patent Primary Examiner
A plasma processing apparatus includes a balun having a first input terminal, a second input terminal, a first output terminal, and a second output terminal, a vacuum container, a first electrode electrically connected to the first output terminal, a second electrode electrically connected to the second output terminal, and a connection unit configured to electrically connect the vacuum container and ground, the connection unit including an inductor.
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