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US Patent 8293068 Plasma processing apparatus

Patent 8293068 was granted and assigned to Tokyo Electron on October, 2012 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

82930680

Patent Inventor Names

Chishio Koshimizu0

Shinji Himori0

Date of Patent

October 23, 2012

Patent Application Number

124109430

Date Filed

March 25, 2009

Patent Citations Received

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US Patent 11784030 Plasma processing apparatus

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US Patent 12062524 Plasma reactor having a variable coupling of low frequency RF power to an annular electrode

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US Patent 11961710 Plasma processing apparatus

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US Patent 11756773 Plasma processing apparatus

Patent Primary Examiner

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Maureen Gramaglia

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