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US Patent 11579166 Resonant accelerometer
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Patent
Current Assignee
Meta
Date Filed
March 18, 2022
Date of Patent
February 14, 2023
Patent Applicant
Meta
Patent Application Number
17698439
Patent Citations
US Patent 10131533 Microelectromechanical system device and method for manufacturing the same
US Patent 10352960 Free mass MEMS accelerometer
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11579166
Patent Primary Examiner
Xin Y Zhong
CPC Code
G01P 2015/0862
G01P 15/13
B81B 2201/0235
B81B 3/0018
G01P 15/0975
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