Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 9, 2023
0Patent Application Number
170181140
Date Filed
September 11, 2020
0Patent Citations
...
Patent Primary Examiner
A semiconductor device and method of manufacture are provided. In embodiments a memory array is formed by manufacturing portions of a word line during different and separate processes, thereby allowing the portions formed first to act as a structural support during later processes that would otherwise cause undesired damage to the structures.
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