US Patent 11656139 Thermal conductivity gauge
Patent 11656139 was granted and assigned to MKS Instruments on May, 2023 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 20, 2020
0
Date of Patent
May 23, 2023
0
Patent Applicant
Patent Application Number
16953923
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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