Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
May 30, 2023
0Patent Application Number
167886910
Date Filed
February 12, 2020
0Patent Citations
Patent Primary Examiner
A memory device includes a substrate, a buried word line, a connecting structure, an air gap, and a first dielectric layer. The buried word line is disposed in the substrate. The connecting structure is disposed on the buried word line. The air gap is disposed on the buried word line and is adjacent to the connecting structure. The first dielectric layer is disposed on the connecting structure and the air gap, wherein the buried word line, the connecting structure, and the first dielectric layer are disposed in the first direction, which is substantially perpendicular to the top surface of the substrate.
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