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US Patent 11665968 Piezoelectric MEMS microphone

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Is a
Patent
Patent
0

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
116659680
Date of Patent
May 30, 2023
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Patent Application Number
171801930
Date Filed
February 19, 2021
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Patent Citations
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US Patent 11206494 Microphone device with ingress protection
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US Patent 10825982 Piezoelectric micro-electro-mechanical systems (MEMS) device with a beam strengthening physical element
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US Patent 10964880 Piezoelectric MEMS microphone
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US Patent 7732990 Piezoelectric driven MEMS device
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US Patent 8531088 Piezoelectric MEMS microphone
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US Patent 8787601 Condenser microphone
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US Patent 8896184 Piezoelectric MEMS microphone
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US Patent 9853201 Piezoelectric MEMS microphone
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...
Patent Primary Examiner
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Angelica M McKinney
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CPC Code
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H01L 41/1132
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H01L 41/1136
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H01L 41/1138
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H01L 41/187
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B81B 3/0021
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B81B 7/0032
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B81B 7/02
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B81B 2201/0257
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...

A microphone including a casing having a front wall, a back wall, and a side wall joining the front wall to the back wall, a transducer mounted to the front wall, the transducer including a substrate and a transducing element, the transducing element having a transducer acoustic compliance dependent on the transducing element dimensions, a back cavity cooperatively defined between the back wall, the side wall, and the transducer, the back cavity having a back cavity acoustic compliance. The transducing element is dimensioned such that the transducing element length matches a predetermined resonant frequency and the transducing element width, thickness, and elasticity produces a transducer acoustic compliance within a given range of the back cavity acoustic compliance.

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