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US Patent 11665968 Piezoelectric MEMS microphone

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
February 19, 2021
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Date of Patent
May 30, 2023
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Patent Application Number
17180193
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Patent Citations
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US Patent 11206494 Microphone device with ingress protection
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US Patent 10825982 Piezoelectric micro-electro-mechanical systems (MEMS) device with a beam strengthening physical element
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US Patent 10964880 Piezoelectric MEMS microphone
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US Patent 7732990 Piezoelectric driven MEMS device
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US Patent 8531088 Piezoelectric MEMS microphone
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US Patent 8787601 Condenser microphone
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US Patent 8896184 Piezoelectric MEMS microphone
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US Patent 9853201 Piezoelectric MEMS microphone
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US Patent 10001391 Adjusting resonant frequencies based on feedback networks
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US Patent 10170685 Piezoelectric MEMS microphone
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11665968
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Patent Primary Examiner
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Angelica M McKinney
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CPC Code
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H01L 41/1132
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H01L 41/1136
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H01L 41/1138
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H01L 41/187
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B81B 3/0021
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B81B 7/0032
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B81B 7/02
0
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B81B 2201/0257
0
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B81B 2203/0127
0
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B81B 2203/0315
0
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