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US Patent 11667577 Y

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Is a

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Patent Applicant

Applied Materials

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Current Assignee

Applied Materials

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Date of Patent

June 6, 2023

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Patent Application Number

172320130

Date Filed

April 15, 2021

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Patent Citations

US Patent 8021762 Coated articles

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US Patent 8034734 Semiconductor processing apparatus which is formed from yttrium oxide and zirconium oxide to produce a solid solution ceramic apparatus

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US Patent 8623527 Semiconductor processing apparatus comprising a coating formed from a solid solution of yttrium oxide and zirconium oxide

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US Patent 8728967 High purity powders

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US Patent 10563303 Metal oxy-flouride films based on oxidation of metal flourides

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US Patent 10577286 Rare-earth oxide based chamber material

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US Patent 10584068 Rare-earth oxide based chamber material

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US Patent 7148167 Alumina/zirconia ceramics and method of producing the same

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Patent Primary Examiner

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CPC Code

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A method of manufacturing a chamber component for a processing chamber comprises forming a green body using a Y

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