Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jennifer Y. Sun0
Biraja P. Kanungo0
Date of Patent
March 10, 2020
Patent Application Number
15796495
Date Filed
October 27, 2017
Patent Citations Received
Patent Primary Examiner
Patent abstract
An article comprises a plasma resistant ceramic material comprising 80-90 mol % of Y2O3, over 0 mol % to 20 mol % of ZrO2, and 10-20 mol % of Al2O3.
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