Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jennifer Y. Sun0
David Fenwick0
Date of Patent
May 25, 2021
0Patent Application Number
162792470
Date Filed
February 19, 2019
0Patent Citations
Patent Primary Examiner
Patent abstract
A chamber component for a processing chamber comprises a ceramic body consisting of a sintered ceramic material consisting essentially of one or more phase of Y2O3—ZrO2. The ceramic material consists essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2.
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