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US Patent 10443125 Flourination process to create sacrificial oxy-flouride layer

Patent 10443125 was granted and assigned to Applied Materials on October, 2019 by the United States Patent and Trademark Office.

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Patent abstract

An article comprises a body having a coating. The coating comprises a Y—O—F coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.

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