Patent attributes
An apparatus and method are provided that can identify an array direction of a measurement object formed in a linear shape and efficiently perform a localized measurement of the measurement object. A measurement apparatus includes a distance measuring unit, a deflecting unit which deflects a direction of emission of measurement light with respect to a reference optical axis and which is capable of performing scanning with the measurement light with respect to a prescribed center in a circumferential direction, and a calculation control unit which controls the distance measuring unit and the deflecting unit. The calculation control unit detects coordinates of intersection points of a measurement object formed in a linear shape and a scanned trajectory of the measurement light with the basis of a distance measurement result by the distance measuring unit and the direction of emission that is deflected by the deflecting unit, and identifies an array direction of the measurement object on the basis of the coordinates of a plurality of intersection points.
