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US Patent 11670497 Light emitting sealed body and light source device
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Patent
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Current Assignee
Hamamatsu Photonics
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Date Filed
September 29, 2022
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Date of Patent
June 6, 2023
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Patent Applicant
Hamamatsu Photonics
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Patent Application Number
17956237
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Patent Citations
US Patent 10109473 Mechanically sealed tube for laser sustained plasma lamp and production method for same
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US Patent 7435982 Laser-driven light source
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US Patent 8921814 Photon source, metrology apparatus, lithographic system and device manufacturing method
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US Patent 9924585 Radiation source, metrology apparatus, lithographic system and device manufacturing method
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US Patent 9934927 Infrared light generating system
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US Patent 11367989 Light emitting unit and light source device
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11670497
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Patent Primary Examiner
Christopher M Raabe
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CPC Code
H01J 61/35
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H01J 61/302
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H01J 65/04
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