US Patent 11673224 Light transmitting member, polishing pad, and substrate polishing apparatus
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US Patent 11673224 Light transmitting member, polishing pad, and substrate polishing apparatus
Article
Disclosed is a light transmitting member for a polishing pad. The light transmitting member has a cylindrical or truncated conical shape, and a screw thread is formed on a side portion thereof. A polishing pad includes such a light transmitting member and a substrate polishing apparatus includes such a polishing pad.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
116732240
Date of Patent
June 13, 2023
0Patent Application Number
164049400
Date Filed
May 7, 2019
0Patent Citations
Patent Primary Examiner
CPC Code
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